The excimer laser has important applications in micro-machine process, medicine and optical communication.
准分子激光在微机械加工，医学，光通讯中具有重要应用。
Surface roughness is an important parameter to reflect the micro-geometry in machine process, and also an important part of modern precise measurement technique.
表面粗糙度是机械加工中描述表面微观形貌非常重要的一个参数，表面粗糙度测量技术是现代精密测试计量技术的一个重要组成部分。
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