The excimer laser has important applications in micro-machine process, medicine and optical communication.
准分子激光在微机械加工，医学，光通讯中具有重要应用。
Surface roughness is an important parameter to reflect the micro-geometry in machine process, and also an important part of modern precise measurement technique.
表面粗糙度是机械加工中描述表面微观形貌非常重要的一个参数，表面粗糙度测量技术是现代精密测试计量技术的一个重要组成部分。
This paper is proposed to function design and process design of the machine vision in micro-assembly system. And this paper improved algorithm in some key step in the process of machine vision.
本文对微器件装配系统中机器视觉的功能和过程进行了设计，并对各部分算法进行了改进设计使其能够满足微装配的实时检测定位的功能。
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