micro-electro-mechanical system process
micro-electro-mechanical system process
微机电系统工艺
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统是具有广泛应用前景的新兴学科， 微加工工艺是实现微机电系统的关键技术。
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