Variable-gapcapacitance sensor has high sensitivity, specially applying to non-contact measurement of micro displacement, and slightly affecting the system to be measured.
变气隙式电容传感器具有灵敏度高、特别适用于微小位移的非接触测量，对被测系统影响小。
A set of data processing system of EFPI optical fiber micro displacement sensor is designed.
设计了一套EFPI光纤微位移传感器数据处理系统。
Measurement and control system are made up of the control host computer, motion control card and intelligent laser micro-displacement sensor.
以工业控制计算机为控制主机，选择了运动控制卡和智能型激光位移传感器，组成了测量控制系统。
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