micro change capacitive sensor 微变电容式传感器
capacitive-micro-sensor 电容式微传感器
ceramic capacitive micro-pressure sensor 陶瓷电容式微压传感器
A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.
设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。
Aim at the disadvantage of traditional sensor for structural health monitoring for long, a new type of micro capacitive sensor based on MEMS is developed.
针对传统的传感器无法进行长期健康监测的不足，研发出一套新型的基于MEMS的硅微电容式传感器。
Using this method, the behavior equation of a capacitive micro pressure sensor is represented, then its reusable parameterized schematic-drive model is established coded by HDL (MAST).
针对电容式微型压力传感器，专门考虑膜片的空间连续行为以及结构、静电力的耦合作用，建立了包含接口电路在内的系统模型，据此进行了动态行为仿真。
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