The operational principle and the lumped parameters model of capacitive micro-accelerometer are introduced.
介绍了微加速度计的工作原理，得出了不同方向上的加速度计的等效刚度。
The noise of capacitive micro accelerometer include mechanical thermal noise and electrical thermal noise;
电容式微加速度计的噪声包括机械热噪声和电热噪声；
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.
硅微机械加速度计作为一种可以测量加速度的传感器，可分为压电式、隧道式、压阻式和电容式等。
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