Two-dimensional thermal simulations of the microbolometer with a micro-bridge structure by finite element method were done.
利用有限元法对微桥结构的测辐射热计进行了二维热模拟。
The influence of thermal insulation layer on temperature distribution is analyzed compared with that of micro bridge structure.
分析了复合热释电薄膜红外探测器的绝热层对温度场的影响，并将它与微桥结构探测器的性能进行了比较。
The structure of micro cantilever bridge, the photolithographic mask and the circuit system of the sensor is designed.
从理论上阐述了微悬桥结构气体流速传感器的工作原理，设计了微悬桥的结构、工艺版图以及其电路系统。
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