A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.
设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。
The audio frequency inspection system is mainly composed of the impulse excitation device, acoustic sensor, signal conditioning circuits, data acquisition card and micro-computer and so on.
音频检测系统主要由脉冲激励装置、音频传感器、信号调理电路、数据采集卡和微型计算机等部分组成。
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