The principle, advantages and disadvantages, machining precision, and applications of MEMS processing technology are described.
阐述了这些MEMS加工技术的工艺原理、优缺点、加工精度、应用等。
Using IC-compatible silicon as substrate and MEMS processing technology, it is fabricated with silicon wet etching and SU8 micro reaction pool.
以与IC兼容的硅作为基底材料，利用MEMS加工工艺，采用硅腐蚀及SU8微反应池方法制成了新型微电极传感器。
Several typical silicon based MEMS processing technologies and applications are introduced, and the development tendencies of MEMS processing technology are prospected.
介绍了几种典型的硅基MEMS加工技术以及应用，并简单展望了MEMS加工技术发展趋势。
应用推荐