The thermal conductivity sensor integrating MEMS and semi-conductor technique can effectively enhance the measuring precision and reliability of the instrument.
本实用新型采用运用MEMS 技术和半导体工艺集成而成的热导传感器，有效提高了测量精度和可靠性；
This dissertation aims to solve two key problems on optimizing design of mechanism and driving technique for the development of a test instrument for measuring mechanical properties of MEMS materials.
本文的研究目的是为一种MEMS材料力学性能测试仪的研制解决机构优化设计和驱动技术两大关键问题。
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