This paper designs a set of MEMS dynamic testing system based on machine micro-vision.
本文设计了一套基于机器微视觉的MEMS动态测试系统。
MEMS dynamic testing system based on stroboscopic microscopic interferometry is introduced. The algorithm of data analyzing is developed.
介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理,设计了数据分析处理算法。
Based on MEMS dynamic testing system this paper designs a set of stroboscopic driving circuits to acquire clear image of high speed MEMS device.
本文基于机器微视觉的MEMS动态测试系统,设计了一套频闪驱动电路,用于采集高速运动的MEMS器件的清晰图像。
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