It gives full preparation to extract and analysis dynamic characteristics of MEMS devices.

从而为后续MEMS器件动态特征的提取和分析做充分的准备。

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The transient characteristics of the dynamic stress of MEMS (Micro Electro Mechanical system) decides that it is hard to be measured directly by using the traditional stress measurement system.

微机电系统(MEMS)动态应力的瞬态特性决定了传统的应力测试系统无法直接满足它的测试需要。

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