The characteristic size of MEMS components is from micron to millimeter.
MEMS器件的特征尺寸范围为几微米到几毫米。
As one of the most important components of RF circuits, high Q inductors realized with RF-MEMS are the most active research subjects.
作为射频电路的重要元件，高Q值电感已经成为RF - MEMS器件研究中的热点。
As a kind of MEMS actuators, micro mechanical radio frequency switch is a representational structure of micromechanical technology, and basis of many micro mechanical components.
微机械射频开关作为MEMS执行器的一种，是微机械技术中的一类有代表性的结构，是很多微机械器件的基础。
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