This paper is to research and design the low-pass filter of the MEMS capacitive accelerometer sensor readout circuit.

本文研究设计了适于MEMS电容加速度传感器读出电路的低通滤波器。

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Aim at the disadvantage of traditional sensor for structural health monitoring for long, a new type of micro capacitive sensor based on MEMS is developed.

针对传统的传感器无法进行长期健康监测的不足，研发出一套新型的基于MEMS的硅微电容式传感器。

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Comparison of the MEMS-based capacitive pressure sensor with a general structure sensor, the output linearity of the proposed sensor has been improved by 48.38%, reaching 1.6%.

分析结果表明，与常规的双极板微型电容式压力传感器相比，新型结构压力传感器的线性度改善了48.38%，达到了1.6%。

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