采用微机电系统(MEMS-Micro Electro-Mechanical Systems)技术的CS-IMU01型数字式惯性测量单元(IMU)是三轴六自由度固态惯性传感器组合,可精确测量空间坐标系中三个轴的角速率和线加速度...
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These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical systems (MEMS) that can perform real-time distributed control.
这些微器件与信号调节和处理电路集成后,组成了可执行分布式实时控制的微电子机械系统(MEMS)。
Giant magnetostrictive thin films are very promising for micro-electro-mechanical systems (MEMS) as they combine high energy output, high frequency and remote control operation.
超磁致伸缩材料以其高能量输出、高操作频率、远程非接触式控制等特点广泛应用于各种微机械系统中。
A differential laser Doppler system is built to measure the in-plane movement of micro-electro-mechanical systems (MEMS), and the vibration of a MEMS resonator has been measured.
建立了用来检测微机电系统谐振器面内运动的激光差动多普勒系统,测量了谐振器的振动速度。
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