The principle, making method, technology and procedure for the rim phase shifting mask are described. Some experimental results are given.
论述了边缘相移掩模的原理、制作方法和工艺步骤，并给出了一些实验结果。
Single step mask fabrication process is developed for LIGA technology, which made mask-making process simplified.
在LIGA技术研究中提出了一次掩膜成型法，简化了工艺过程；
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