magnetic micro-actuator 磁微执行器
Using the process, we realized the magnetic micro actuator.
并运用该工艺实现了微磁执行器。
As compared with the traditional actuator, Micro-magnetic actuator has advantage such as smaller, lighter, cheaper and more stable process flow.
与传统的微驱动器相比，微电磁驱动器具有体积小、重量轻、加工工艺稳定以及成本低等优点。
In this paper, the feature and the development trend of the MEMS technology are introduced. And the operational principles and the fabrication craft of the magnetic micro-actuator with a mult...
介绍了MEMS的特点、特征、技术发展趋势，MEMS器件的类型及其功能，并以多层弯曲磁芯结构微执行器为例介绍了磁驱动微执行器工作原理与制作工艺过程。
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