... ion beam 离子束 ion beam probe 离子束探针 ion bombardment 离子轰击 ...
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ion-beam probe 离子束探针
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If there was a problem with the chip, you could probe the metal directly to watch the circuitry, and, with a focused-ion-beam system, you could even rewire it.
如果芯片有问题，应该直接研究金属层来察看电路，而对于聚焦离子束系统则应该重新布线。
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