The mathematical models of surface profile as well as dividing the instrument error and the measurement interference are established.
本文还建立了表面轮廓和分离表面轮廓测量干扰及仪器误差的数学模型。
A contact surface profile measurement system which is based on white-light interference measuring technique is proposed.
提出了一种基于白光干涉测量技术的接触式表面形貌测量系统。
A phase interference method, for measurement of the relative change of surface acoustic wave velocities, is presented.
本文提出了一种相位干涉法。用来测量表面声波速度的相对变化。
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