An integrated CMOS-compatible Pirani vacuum sensor system has been investigated and developed in this work, combining the traditional Pirani gauge with the MEMS technology.
本文将传统的皮拉尼计与MEMS技术结合起来，研制了一款与标准CMOS工艺兼容的集成皮拉尼传感器系统。
An integrated microstructure PCR-DNA amplification biochip based on MEMS technology was fabricated, which includes heater, temperature sensor, reaction chamber and inlet channels.
基于MEMS技术研制了微结构的集成PCR-DNA分子扩增生物芯片，芯片集成了加热子、温度传感器、反应室、进样通道等；
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