integrated absolute capacitive pressure sensors
integrated absolute capacitive pressure sensors
集成绝对电容式压力传感器
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Integrated absolute capacitive pressure sensors, coping with disadvantages of traditional sensors and being applicable of batch-processing, are novel sensors based on CMOS IC Technology.
CMOS集成电容绝对压力传感器是基于集成电路主流工艺集成的新型传感器,克服了传统传感器的缺点并利于批量生产。
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