It is considered that in the initial stage of film growth, the space reaction processes play an important role for the low-temperature crystallization of pc-Si film.
因此可以认为，在多晶硅薄膜生长的最初阶段，空间反应过程对低温晶化起重要作用。
The results showed that during the initial stage of reaction, conversion rate was larger and the content of "oil" (include gases and water) in the product increased quick-ly.
结果表明，在反应初期，煤转化速度较快，氢初压和反应温度的提高对加快煤转化速度是有利的。
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