... 氢钝化 [gap=1265]Key word: Silicon nitride , PECVD, anneal, solar cells, ARC, hydrogen diffusion, hydrogen passivation, ...
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However, because there are polar bonding on SiC surface, Tradditional wet hydrogen passivation technology is not fit for SiC.
由于SiC表面存在极性键,传统的湿法氢钝化技术并不适合SiC。
参考来源 - SiC半导体表面处理技术研究·2,447,543篇论文数据,部分数据来源于NoteExpress
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