...高温压力传感器；压阻；敏感薄膜；SOI（绝缘体上硅）；MEMS（微机电系统） [gap=1106]Keywords: high temperature pressure sensor；piezoresistance；sensitive membrane；SOI（Silicon on Insulator）；MEMS（Micro Electro..
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High temperature SOI Monocrystal silicon pressure sensor is a new type high temperature pressure sensor with high performances.
单晶硅soi高温压力传感器是一种新型高性能高温压力传感器。
A kind of pressure sensor applied to high-temperature, high-pressure and corrosive environment was designed to meet the demand of research on extreme environment.
设计一种可应用于高温高压、强腐蚀性环境的压力检测传感器，以满足极端环境科学研究的需求。
According to the result of simulation and characteristic of monocrystalline silicon SOI structure, a novel high temperature SOI pressure sensor with a rectangle diaphragm was designed.
根据模拟结果并结合单晶硅材料和SOI结构的特点，设计出了矩形应力膜单晶硅soi高温压力传感器芯片。
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