Liu K, li Y. High precision alignment of phase-shifting point diffraction interferometer. (manuscript finished).
刘克，李艳秋。相移点衍射干涉仪的高精度对准。(已完稿)。
Construction features of stamping parts were in-depth analyzed and flexible data measuring method was used to realize high precision alignment of multi-view data.
在深入分析冲压零件结构特点的基础上，采用柔性数据测量方法实现高精度多视数据对齐。
The principle and implementation of high precision video based alignment system are described.
阐述高分辨力光刻机的图像对准系统的原理及实现过程。
应用推荐