Heavy boron-diffusion and self-stopped etch technique is a universal means to control the thickness accurately in micromachining. It is widely used in the micromachining process of inertial devices, such as gyroscope and micro-accelerometer.
浓硼扩散腐蚀自停止工艺是微机械加工中用于精确控制厚度尺寸的常用工艺,被广泛应用于微陀螺、微加速度计等惯性器件的加了工艺中。
参考来源 - 单晶硅自停止腐蚀工艺研究·2,447,543篇论文数据，部分数据来源于NoteExpress
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