Gray scale mask method is a novel way of fabricating binary optical elements.
灰度掩模法是一种新的二元光学器件制做方法。
The applications of gray scale mask technique in the fabrication of convex and concave microlens and hybrid refraction diffraction microlens are discussed.
讨论了制作适用于近场集成光学头中的凸形、凹形微透镜和折衍射复合微透镜的灰度掩模技术。
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