Using the method of rigorous coupled-wave theory to compute the diffraction efficiency of a grating, the program for calculating diffraction efficiency for both te and TM polarization is made.
通过利用严格的耦合波理论计算光栅衍射效率的方法，分别编制出了计算te波和TM波的衍射效率程序。
The rigorous coupled-wave theory is used to analyze the characteristics of grating diffraction, and the results indicate that this method produces no phase distortion.
运用严格的光栅衍射耦合波理论分析光栅的衍射特性，发现该方案不会引入相位畸变。
This paper presents a new non-contact displacement sensor with diffraction grating metrology system based on an improved Foucault focus detection method.
本文介绍了一种新型的基于改进傅科聚焦探测法且自带衍射光栅计量系统的非接触式位移传感器。
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