glow-discharge heating 辉光放电加热
This paper deals with the problems of ionization proportion, ion density and heating work piece on glow discharge.
从理论上研究了辉光放电时的离化率、正离子浓度、工件的加热问题。
Using heating substrate, glow discharge and thermal treatment after deposition, the durability of coatings is also very robust.
通过离子轰击、基板烘烤和热处理获得了满意的膜层牢固度。
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