Image processing method is used to carry out frequency sweep and voltage sweep measurement. The in-plane motion characteristic of MEMS is obtained and the testing results are analyzed and discussed.
利用图像处理方法对MEMS谐振器做扫频和扫压测量，获得了MEMS器件的平面微运动特性，并对测量结果进行了分析和讨论。
The testing error and the reason of error are analyzed, compared with the results received by the sweep-frequency measurement method.
将微悬臂梁和微薄膜振动特性的测量结果与频率扫描法的测试结果进行了比对，对产生的误差及误差来源进行了分析。
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