The film morphologies and structures as well as different properties were also studied.
并对复合薄膜的形貌结构及性能进行了研究。
The results indicate that the change in fractal dimension is directly proportional to the surface quality, but the roughness can′t be used to describe the morphologies of film surfaces perfectly.
结果表明，分形维的大小与薄膜表面质量成正比，而表面粗糙度不能全面描述薄膜表面形貌；
The surface profiles, micro-morphologies and crystal quality of SSP ribbon and Poly-Si film were then investigated by the step profiler, XRD (X-ray Diffraction) and SEM (Scanning Electron Microscopy).
借助台阶仪、X射线衍射(XRD)、扫描电镜(sem)等手段对颗粒硅带及多晶硅薄膜进行了表面轮廓、结晶质量和微观形貌的表征。
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