film deposition and lithography
薄膜沉积与曝光 (Film deposition and Lithography) 离子布植与氧化 (Ion implantation and Oxidation)
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film deposition and lithography
胶片沉积和光刻
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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A novel process combining the self-assembly technique with electron beam lithography and selective chemical deposition was proposed for patterned film preparation.
本文提出了一种新颖的结合自组装技术和电子束直写曝光以及选择性化学沉积制备图案化薄膜方法。
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