Rutherford backscattering spectrometry (RBS) demonstrates that the concentration of Fe or N atoms varies gradually from the substrate to the surface through the whole thickness of the films.

卢瑟福背散射分析结果表明，铁、氮两种原子的密度沿膜厚度方向呈梯度变化。

youdao

The result of XPS experiment has proofed that the performance changed of the Fe-O, Fe-N-O films is because the composition and structure of film has changed after heat treatment.

XPS实验结果证明薄膜性能改变的原因是热处理后薄膜的成分与结构发生了明显的变化。

youdao