According to comparing with simulation annealing algorithm the paper introduce very fast simulation annealing algorithm and use VFSA to compute the ellipsometry data.
对比模拟退火算法介绍了非常快速模拟退火算法的流程，并使用非常模拟退火算法计算了椭偏数据。
Meanwhile, we use a fast simulation annealing algorithm in the inversion, which can overcome the limitation of the local extremum of objective function, and acquire a global optimum result.
同时，在具体反演中使用快速模拟退火算法，可以克服目标函数局部极值的限制，从而获得全局最优解。
Simultaneously has made the improvement to the traditional network and the simulation annealing algorithm, obtained one kind of fast and highly effective restraining algorithm finally.
同时又对传统的网络和模拟退火算法进行了改进，最终得到了一种快速、高效、收敛的算法。
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