...产线自动化接口及设备之间的工艺数据同步 主要技术参数 分辨率(Resolution) 2um L/S or better 曝光光源(Exposure Light Source) i-line mercury lamp 套刻精度(Overlay) 0.6um or better 焦深(Depth o ..
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Applied to the exposure light source are:contains a lot of UV metal halogen lamp, high pressure mercury vapor lamp and so on;
应用于曝光的光源有：含有大量紫外线金属卤素灯、高压水银灯等；
Exposure: The process in which light sensitive materials, such as film or plates, are exposed to a light source.
曝光：把感光材料如菲林或印版登载体光源下曝光的处理。
Fourth-generation phototypesetters: phototypesetters that use laser as light source for exposure.
第四代照排机：采用激光作曝光的照相排字机。
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