EDM tool electrode with high aspect ratio is produced successfully by combining deep lithography with electroforming.
采用深度光刻与电铸技术相结合的方法，较好地解决了大深宽比的电火花工具电极的制造问题。
Tool electrodes are very important factor in electrical discharge machining (EDM). The properties of electrode materials have a great influence on EDM performance.
工具电极是电火花加工中非常重要的因素，电极材料的性能对电火花加工性能具有很大影响。
Enhancing electrical erosion resistance of tool electrode and reducing electrode wear is one of research keys to fabricate HARMs with micro EDM technology reliably, stably and efficiently.
增强工具电极材料的耐电蚀能力，降低电极损耗是微细电火花加工技术可靠、稳定且高效制造高深宽比微结构和器件的研究关键之一。
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