dry etching 干蚀刻 ; [电子] 干法刻蚀 ; 干法腐蚀 ; 干腐蚀
dry etching reactor 干腐蚀反应器
dry etching apparatus 干腐蚀装置
dry etching system 干式蚀刻系统 ; 干蚀刻机 ; 干法刻蚀设备
ar ion beam dry etching ar离子束干法刻蚀
dry etching process 干法刻蚀 ; 干法蚀刻工艺
ICP dry etching ICP干法刻蚀
dry etching damage 干法刻蚀损伤
以上来源于: WordNet
The fabrication methods of MPC include electron beam lithography with subsequent evaporation and lift-off, interference lithography with dry-etching technology etc.
制备金属光子晶体方法包括：电子束刻蚀结合后续剥离法、激光干涉光刻结合干刻蚀技术等。
Dry etching technique of silicon is a very important process in the modern semiconductor industry.
对硅的干法刻蚀技术是现代半导体工业中非常重要的一项工艺。
The latest advance of the dry etching for submicron fabrication in ULSI production and interrelated technology are introduced.
综述了亚微米、深亚微米干法刻蚀和相关技术的最新进展及其在超大规模集成电路制造中的应用。
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