double-side excitation and differential detection
...双端激励/差分检测 [gap=648]Key words：MEMS;resonant microsensor;disturbance of the same frequency;double-side excitation and differential detection ...
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double-side excitation and differential detection
双侧激励和差动检测
以上为机器翻译结果，长、整句建议使用 人工翻译 。