This paper summarizes the type, application advantage and tendency of direct writing technique in electronic industry.
概述了在电子工业中直写技术的种类和应用优点与趋势。
The lithography technique to fabricate the curved microlens array on the curved substrate by using laser direct writing system was also given.
文中给出了用激光直写设备在曲面基底上进行光刻来制作曲面微透镜阵列的方法。
Laser direct writing system is the key equipment for fabrication of optical diffractive elements, and the defocus detection technique is the important sub-tech in it.
激光直写机是制作衍射光学元件的关键设备，离焦检测技术是其中的重要单元技术之一。
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