Laser direct writing system is the key equipment for fabrication of optical diffractive elements, and the defocus detection technique is the important sub-tech in it.
激光直写机是制作衍射光学元件的关键设备，离焦检测技术是其中的重要单元技术之一。
Diffractive-optical element, scanning optical system, optical scanner, and image forming apparatus.
光学衍射元件，光学扫描系统，光扫描器和图像形成装置。
The method has been successfully used in the system for measuring the 3-d surface topography of diffractive optical elements.
此方法已成功地应用于自行研制的衍射光学元件三维表面形貌测量系统中。
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