The frequency responses of the system combing probe tip and piezo chip were detected, the difference between the shear force detection and the tapping mode detection was discussed.
文中给出了探针-压电片检测系统的的频率特性，并比较了剪切力探测和轻敲模式探测特性的区别。
The heterodyne detection is used to detect the output signal frequency difference between the reference arm and sensing arm, which is caused by the temperature variation.
外差探测用来探测传感臂和参考臂由于温度变化引起的输出信号的频率差异。
The system comprises low frequency-difference two-frequency laser interferometer measuration module, micro-detection device and two dimension platform.
系统由低频差双频激光干涉度量模块和微探头及二维工作台两部分组成。
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