The initial growth process of diamond grain synthesized by HFCVD method was investigated by using XL30FEG SEM.

用XL 30feg扫描电镜对热丝化学气相沉积(HFCVD)法合成的金刚石颗粒的初期生长过程进行了研究。

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Epitaxial diamond films and polycrystalline diamond grain were obtained on (100), (110) and (111) surface of synthesized single-crystal diamond substrates.

在金刚石的(100)，(110)和(111)面上分别获得了单晶金刚石膜和金刚石多晶粒子。

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Scanning electron microscope (SEM) and X-ray diffraction (XRD) were used to measure the surface morphology, the crystal microstructure and the distribution of diamond grain in the film.

用扫描电镜(sem)和X射线衍射(XRD)方法检测了复合膜的表面形貌、晶体显微结构和复合膜中金刚石颗粒的分布情况。

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