Influence of pulse duration on deflecting electric field PIII was investigated in this paper.
研究了采用偏转电场法注入时注入电压脉冲宽度对注入效果的影响。
The deflecting electric field method we presented has been proved to be valid for inner surface PIII, and can increase retained dose and implant energy greatly.
研究表明,提出的偏转电场法是进行内表面注入处理的有效方法,可以极大提高内表面注入的注入剂量和注入能量。
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