• 缺陷工程 - 引用次数：5

  Defect engineering has also been discussed as the key factor to improve the bulk and surface quality of the large diameter silicon polished wafers,as well as silicon-on-insulator materials.

  同时还介绍了绝缘体上硅(SOI)材料的缺陷工程研究。

  参考来源 - 深亚微米集成电路用硅片表面质量及缺陷工程

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