The scanning mirror precise servo system is designed by the scheme of compound control of open and closed loops with current, velocity and position loops in this paper.
针对扫描镜精密伺服系统，本文采用按照电流环、速度环和位置环等三个回路进行控制系统设计的开闭环复合控制方案。
A design method of microcomputer closed-loop scanning and control system based on grating check is presented.
提出了一种基于光栅检测的单片机闭环扫描控制系统的设计方案。
The deflection system of an electron beam lithography tool is used to control deflection scanning of electron beam.
电子束曝光机的偏转系统控制电子束偏转扫描。
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