Points out that the environment parameters of high class clean rooms in a microelectronic factory directly affect the product quality.

指出超高级别微电子洁净厂房环境参数对产品质量至关重要。

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Article 19: Measures shall be taken to protect against cross contamination of personnel and materials entering or leaving clean rooms (areas) of different cleanliness class.

第十九条不同空气洁净度等级的洁净室(区)之间的人员及物料出入，应有防止交叉污染的措施。

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