A novel micromachining torsion beam optical switch micro- actuator driven by electrostatic force was designed and simulated by means of Finite Element Method (FEM).
报导了一种新型静电驱动扭转梁大位移微机械光开关微动作器的模拟、设计和制作。
The switching time calculation method of the electrostatic driven MOEMS optical switch with torsion beam structure was presented, and the formula of the switching time was given.
本文结合静电驱动扭臂式MOEMS光开关，给出了响应时间的计算方法，得出开关时间的计算公式。
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