Measurement of sample: single sample automatic measuring, measuring the number of times 2, 3, 5, 10, 50 set, measured at the end gives the average value and standard deviation.
样品测量：单样品自动测量，测量次数2、3、5、10、50次任意设定，测量结束给出平均值和标准偏差。
In case of deviation of the measured average thickness from the specified average value, the Wafer Yield adjustment has to come into force.
万一出现，测量的平均厚度与技术要求的平均厚度出现偏差，晶片的成品率必须进行调整。
The method to count standard deviation of indirect measurement value by using rear-average method was proposed.
对用后均法进行测量数据误差分析加以探讨，提出可以用该法计算间接观测值的标准偏差。
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