atomic force micro-probe 原子力微探针
Micro cantilever probe of atomic force microscope (AFM) is a typical micro mechanical component, which is under a coupling deformation during the contact scanning process.
原子力显微镜（AFM）的微探针系统是典型的微机械构件，它在接触扫描过程处于耦合变形状态。
On the basis of the aiming principle of the atomic force probe a-long with 2D micro-displacement system and the high precision capacitive sensors , the micro-dimension measurement system is developed.
本文基于原子力微探针瞄准原理并结合二维微位移系统和高精度电容传感器，研制了微尺寸测量系统。
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