This paper describes several main film thickness measurement tools with focus on the development and application of film thickness standard materials for calibration purposes.
本文介绍了几种主要的膜厚测量仪器以及这些仪器的校准检测方法，并着重介绍了校准用膜厚标准的制定及应用。
Current application performance-measurement tools have several limitations.
目前的应用程序性能测试工具有多方面的局限。
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